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A User's Guide to Ellipsometry

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Price:
$16.95 (excluding tax)
Product Code:
486450287
Weight:
1.00 LBS
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Product Description

This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. It fourteen case studies illustrate concepts and reinforce applications of ellipsometry particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.


Other Details

ISBN-10 DIGIT:
486450287
AUTHOR-1:
Harland G. Tompkins
COPYRIGHT/PUBLICATION DATE:
1993
BINDING:
Paperback
PAGE COUNT:
260

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